Fluid flow controller
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United States of America Patent
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Feb 16, 1993
Grant Date -
N/A
app pub date -
Apr 8, 1992
filing date -
May 9, 1991
priority date (Note) -
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Abstract
A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterized in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.
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