Mass spectrometer for analyzing ultra trace element using plasma ion source
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United States of America Patent
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Feb 9, 1993
Grant Date -
N/A
app pub date -
Mar 10, 1992
filing date -
Mar 12, 1991
priority date (Note) -
Expired
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Abstract
A mass spectrometer for analyzing ultra trace element using plasma ion source comprising, a plasma generating means for ionizing sampling gas by generating plasma, a vaccum chamber for taking in ions of the sampling gas from a hole of the vacuum chamber, an ion lens and a mass analyzing portion, and an ion detector for detecting the ions which are passed through the ion lens and the mass analyzing portion, wherein further comprising, a moving mechanism for moving said plasma generating means according to a vacuum degree measured in the vacuum chamber so as to make the sensitivity of the mass spectrometer higher.
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