Process for producing ceramic raw materials
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United States of America Patent
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Jan 12, 1993
Grant Date -
N/A
app pub date -
Nov 28, 1989
filing date -
Nov 30, 1988
priority date (Note) -
Expired
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Abstract
The invention relates to a process for the production of silicon ceramic whiskers and silicon ceramic powder from silicon fluoride and ammonia or a hydrocarbon, at an elevated temperature. According to the invention, the hydrocarbon or ammonia (4) is decomposed separately at a high temperature into reactive carbon or nitrogen and hydrogen, whereafter the carbon or nitrogen radical thus obtained is further in a gas phase contacted with reactive silicon formed therein from silicon difluoride, in order to deposit finely-divided silicon nitride or silicon carbide out from the gas phase.
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