Apparatus for vaporizing and supplying organometal compounds
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United States of America Patent
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Nov 3, 1992
Grant Date -
N/A
app pub date -
Sep 11, 1990
filing date -
Sep 12, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for vaporizing and supplying an organometal compound comprising a gas flow path for starting gas which connects a container filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a flow path for a carrier gas which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas and a heat exchanger. The container, the flow path for the starting gas and the flow path for the carrier gas are arranged in a constant temperature oven.
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