Scanning force microscope having aligning and adjusting means
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United States of America Patent
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Oct 20, 1992
Grant Date -
N/A
app pub date -
Mar 13, 1991
filing date -
Mar 13, 1991
priority date (Note) -
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Abstract
A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.
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