Method for the sterilization of ultrapure water line
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United States of America Patent
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Sep 15, 1992
Grant Date -
N/A
app pub date -
Mar 5, 1990
filing date -
Mar 6, 1989
priority date (Note) -
Expired
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Abstract
Periodical sterilization is usually needed in the ultrapure water line provided in an ultrapure water-producing system or plant to kill some occasionally occurring viable cells of microorganisms in the ultrapure water as produced or being produced and thereby keep the ultrapure water under germ-free conditions. Now, it is discovered that an aqueous solution containing 1 to 100 ppm of hydrofluoric acid is effective to sterilize the ultrapure water line and is advantageous over the conventional sterilization agents such as aqueous hydrogen peroxide and sodium hypochlorite which were employed normally for the sterilization of the ultrapure water line.
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