Loading and unloading airlock apparatus for a vacuum treatment chamber
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United States of America Patent
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-
Sep 15, 1992
Grant Date -
N/A
app pub date -
Dec 14, 1989
filing date -
Dec 18, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have substrates detachably mounted thereon, an exhaust port to evacuate the chamber to a vacuum, a gas inlet port to introduce a gas to bring the evacuated chamber back to atmospheric pressure, a rectifying plate provided in the chamber adjacent to and at a predetermined distance away from the substrate holder on that side of the substrate holder upon which the substrates are detachably mounted, and a gas introduction pipe having a gas ejection outlet in said chamber for introducing additional gas in a space defined by the predetermined distance to flow along the surfaces of the substrates and the substrate holder.
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