Vibration detector and method for rotating shaft
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United States of America Patent
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Sep 8, 1992
Issued Date -
N/A
app pub date -
Jul 30, 1991
filing date -
Jun 23, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus for detecting abnormal vibration in a shaft, such as a rotating crucible holder drive shaft of a crystal puller, has a pair of sensors disposed 90 degrees with respect to each other. The signals are high pass filtered and added together, then low pass filtered and full wave rectified to operate an alarm and strip recorder. A method for detecting vibration in a shaft comprises sensing vibrations in the shaft, filtering the sensed signals, and rectifying the filtered signals.
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