Method for inducing fluorescence in parylene films by an active plasma
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United States of America Patent
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Aug 18, 1992
Grant Date -
N/A
app pub date -
Sep 28, 1990
filing date -
Sep 28, 1990
priority date (Note) -
Expired
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Abstract
A method is provided for inducing fluorescence in films or coatings comprised in whole or in part of parylene which involves exposure of the parylene to an active plasma. A method is also provided which utilizes plasma induced fluorescence as a means for quality control inspection of films and coatings of parylene such as those contained on electronic components or for identification and/or authentication of various articles.
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