Capacitively coupled radiofrequency plasma source
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United States of America
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Aug 4, 1992
Issued Date -
N/A
app pub date -
Jan 28, 1992
filing date -
Jan 28, 1992
priority date (Note) -
Withdrawn
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Abstract
A pair of dissimilarly-sized electrodes are driven by a radiofrequency source to create a plasma. A magnetic field is oriented to be parallel to a surface area on the smaller electrode. The field strength increases to either side of that smaller electrode. As shown, ions are electrostatically accelerated out of the plasma, but they instead may be accelerated magnetically, electrons may in the alternative be extracted or there may be no accelerating mechanism.
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