Sealing device
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United States of America Patent
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Jul 28, 1992
Grant Date -
N/A
app pub date -
Feb 26, 1991
filing date -
Feb 26, 1990
priority date (Note) -
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status (Latency Note)
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Abstract
A sealing device of this invention is designed to prevent entering of the open air through a coupling of a process tube of a CVD apparatus. The sealing device includes a first flange having a mirror-finished face, a second flange having a face which is brought into contact with the face of the first flange, at least one gas guide which is open to at least one of the faces of the first and second flanges and an evacuation system for evacuating a region, in which the first and second flanges are brought into contact with each other, through the gas guide.
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