Highpower microwave transmissive window assembly
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United States of America Patent
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Jul 21, 1992
Issued Date -
N/A
app pub date -
Nov 20, 1989
filing date -
Apr 8, 1988
priority date (Note) -
Expired
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Abstract
A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
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