Corrosion resistant thermal treating apparatus
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United States of America Patent
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Jul 21, 1992
Grant Date -
N/A
app pub date -
Jun 26, 1990
filing date -
Dec 27, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A thermal treating apparatus includes a reaction tube having an opening end and storing an object to be treated, an annular manifold arranged at the opening end and having an inlet for supplying a gas to the reaction tube and an outlet for exhausting the gas from the reaction tube, and a cover arranged on the opening end of the manifold. The surfaces of the annular manifold and the cover exposed to the inside of the reaction tube are covered by a material which is not corroded by the gas supplied to the reaction tube.
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