Mass flow controller with supplemental condition sensors
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United States of America Patent
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Jul 14, 1992
Grant Date -
N/A
app pub date -
Nov 13, 1990
filing date -
Nov 14, 1989
priority date (Note) -
Expired
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Abstract
An improved mass flow controller can be connected to a passageway of a fluid, and can utilize a sensor unit for measuring a characteristic of the mass flow, and deriving a corresponding flow rate signal. Supplemental condition sensors can measure other parameters of the flow rate independent of their utilization in determining the actual flow rate, and can monitor and compare the current value of these sensor conditions, with standards to thereby monitor the operational performance of the mass flow controller.
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