Ultrapure water producing system
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United States of America Patent
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Jun 23, 1992
Grant Date -
N/A
app pub date -
Apr 30, 1990
filing date -
May 1, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
This disclosure relates to an ultrapure water producing system having a primary ultrapure water system including a pretreatment process into which raw water is fed, and a primary ultrapure water device connected to the outlet of the pretreatment process. A reservoir is connected to the outlet of the primary ultrapure water device. A secondary ultrapure water system includes a pump having an inlet connected to the reservoir, a polisher connected to the outlet of the pump, and first use point connected to the outlet of the polisher and to the reservoir. A branch line is connected to the outlet of the polisher and has a heating and deaerating part connected thereto, and a high-temperature second use point is connected to the outlet of the heating and deaerating part.
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