Method of producing a cover layer of amorphous carbon on a substrate
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United States of America Patent
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Jun 16, 1992
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N/A
app pub date -
Jun 26, 1989
filing date -
Jun 27, 1988
priority date (Note) -
Expired
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Abstract
A method of providing an amorphous carbon cover layer on an electrophotographic recording material, including the steps of (a) providing a substrate which is an electrophotographic recording material, (b) maintaining the substrate in an atmosphere comprised of argon, hydrogen, and C.sub.2 F.sub.6, and (c) simultaneously with step (b), depositing amorphous fluorinated, hydrogenated carbon on the substrate by direct current magnetron cathode sputtering of glasslike carbon to provide an amorphous carbon cover layer which is transparent, hydrophobic, and has a Vickers hardness of greater than 2000.
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