Surface discharge radiation source
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United States of America Patent
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Jun 2, 1992
Grant Date -
N/A
app pub date -
Dec 11, 1989
filing date -
Dec 11, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrode temperatures can be closely controlled. The construction of the device eliminates the need to maintain parallelism of the discharge space and close tolerances.
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