Spectral microscope with a photometer
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United States of America Patent
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May 12, 1992
Grant Date -
N/A
app pub date -
Aug 24, 1990
filing date -
Dec 24, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microscope with a Kohler illumination device having an at least approximately infinite beam (17) is described. An optical slit (6) is provided in the field diaphragm plane (LF) which is followed by an optical transmission grating (12) in the infinite (17). The resulting zero-order and first-order diffraction images are imaged either simultaneously or one after the other on a sensor (13). The spectral and densitometric distribution in a preselected object (10a) is determined by means of evaluation devices connected after the sensor (13). It is thereby possible, for example, to determine simultaneously the width of an object by means of the densitometric distribution and the height of an object by means of the spectral distribution.
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