Composite useful in photolithography
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United States of America Patent
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Apr 28, 1992
Issued Date -
N/A
app pub date -
Aug 23, 1989
filing date -
Nov 1, 1982
priority date (Note) -
Expired
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Abstract
The image of an object with opaque and transparent regions having a contrast less than the contrast threshold of a layer of photoresist when light of a predetermined wavelength to which the photoresist is sensitive is passed through the object and onto the layer of photoresist is enhanced in contrast by the provision of a contrast enhancing layer contiguous to the surface of the photoresist to a value above the contrast threshold of the photoresist. The contrast enhancing layer is constituted of an aryl nitrone compound mixed with a suitable binder.
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