Method of calibrating scanners and arrangement for producing defined scattered light amplitudes
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United States of America Patent
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Apr 28, 1992
Grant Date -
N/A
app pub date -
May 21, 1990
filing date -
Mar 5, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Calibration of a light scanner, particularly for measuring particles and surface finishes in the inspection of substrates uses a strongly scattering reference medium. A focused laser beam is directed onto the reference medium which is disposed outside the focal plane of the beam. Scattered light from the medium is thus defocused with respect to a photodetector that collects the scattered light. An amplifier connected to the photodetector measures the intensity of the scattered light. By the use of filters in the path of the light calibration of the optico-electronic system of the scanner is achieved.
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