Apparatus for controlled ablation by laser radiation
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United States of America Patent
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Apr 21, 1992
Grant Date -
N/A
app pub date -
Feb 12, 1991
filing date -
Feb 15, 1990
priority date (Note) -
Expired
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Abstract
Apparatus for controlled ablation of material from a predetermined working point, comprising a first laser, in particular excimer laser, for generating laser radiation pulses having a wavelength in a wavelength range suitable for the ablation, in particular in the ultraviolet spectral range, further comprising a radiation analyzer such as a spectrometer for analysis of material-specific radiation from the ablation plume forming at the working point, and a second laser, in particular a tunable dye laser, for generating a further laser radiation in a wavelength range which is different from said first wavelength range and which is better suited for the resonant stimulation of the radiation serving for the analysis than the ablation radiation wavelength range.
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