Contrast enhancement layer compositions, alkylnitrones, and use
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United States of America Patent
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Apr 21, 1992
Issued Date -
N/A
app pub date -
Jan 8, 1991
filing date -
Mar 10, 1988
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Expired
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Abstract
Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.
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