Scanning probe microscope employing adjustable tilt and unitary head
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United States of America Patent
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Apr 7, 1992
Grant Date -
N/A
app pub date -
May 23, 1990
filing date -
May 23, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
This invention is a scanning probe microscope which uses three separate motorized legs to adjust the distance between the probe and sample and to adjust the tilt between the probe and the sample. The microscope is shown configured in various ways. One form is a scanner on a base in which the base contains the sample and legs. Another is a scanner which contains the legs and rests on the sample, or may also rest on a support that spans a larger sample allowing translation of the sample independent of the scanner. Another is a scanner which contains the legs and is mounted so that a sample holder sits on the legs. The latter configuration allows for easy access to the sample. One variation of this configuration has provision for the mounting of several samples which can be sequenced for probing automatically.
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