Robot prealigner
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United States of America Patent
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Apr 7, 1992
Grant Date -
N/A
app pub date -
Mar 7, 1989
filing date -
Mar 7, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
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