Silicon single crystal pull-up apparatus
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United States of America Patent
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Mar 24, 1992
Issued Date -
N/A
app pub date -
Jan 16, 1990
filing date -
Dec 26, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A silicon single crystal pull-up apparatus includes a crucible for containing a molten silicon material, an annular heater disposed so as to surround the crucible for heating the silicon material in the crucible, and a plurality of plate-like members made of heat insulation material and disposed so as to surround the heater, each of the plate-like members has an arc-shaped cross section not less than a two-third circle and is connected with each other at respective side edges thereof such that the plurality of the plate-like members are assembled into a shape of a cylinder having wave-like circumferential side walls.
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