Method of three-dimensional atomic imaging
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United States of America Patent
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Mar 10, 1992
Grant Date -
N/A
app pub date -
Jan 7, 1991
filing date -
Jan 7, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of three-dimensional imaging of the atomic environment of atoms near the surface of the sample involves forming a localized source electron diffraction pattern, detecting the intensity of the distribution of the pattern, and generating data corresponding to the intensity distribution. The intensity data is normalized and corrected for a phase shift error to produce data corresponding to a hologram. The process may be repeated at a several predetermined emitted electron energies, and the data at each energy is combined to yield a composite image intensity having improved resolution. The method of the invention can provide a lenseless electron microscope having a resolution better than one angstrom and which overcomes distortions caused by multiple scattering.
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- 29 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 33 Age