Composite vacuum pump

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United States of America Patent

PATENT NO 5092740
SERIAL NO

07344652

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A composite vacuum pump system having first and second vacuum pumps each having its own rotor and drive motor in which the exhaust of the first vacuum pump is removably coupled to the inlet of the second vacuum pump and the first vacuum pump rotor is driven at a constant torque and in which the second vacuum pump has an inlet for permitting the introduction into the pump of a heavy gas for increasing the efficiency of the pumping system.

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Patent Owner(s)

Patent OwnerAddress
NIPPON FERROFLUIDICS CORPORATIONMINATO-KU TOKYO 107

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamamura, Akira Tokyo, JP 28 363

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