Apparatus for holding and positioning a substrate cassette
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United States of America Patent
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-
Mar 3, 1992
Grant Date -
N/A
app pub date -
May 21, 1990
filing date -
Mar 5, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for holding and positioning a substrate or wafer cassette has a receiving plate which is adjustable on a three-point mounting and is lockable in its position of adjustment. The receiving plate carries runner receivers for initial guidance of a cassette onto the plate by engagement with guide runners on the cassette, and locking pins for the final location of the cassette by engagement with marginal strips on the base of the cassette.
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