Apparatus and method for making surface photovoltage measurements of a semiconductor
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United States of America Patent
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Feb 11, 1992
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N/A
app pub date -
Jul 16, 1990
filing date -
Jul 16, 1990
priority date (Note) -
Expired
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Abstract
An apparatus for making ac surface photovoltage (SPV) measurements of a specimen of semiconductor material under variable dc bias voltage conditions includes a light source whose output beam is intensity modulated, a reference electrode, a guard electrode, a back electrode, a first voltage for biasing the reference electrode with a variable dc voltage and a second voltage separate from the first voltage for biasing the guard electrode such that an accumulation layer is established in the area on the specimen controlled by the guard electrode to prevent flow of carriers between the area controlled by the reference electrode and the rest of the specimen.
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