MOSFET and fabrication method

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United States of America Patent

PATENT NO 5087582
SERIAL NO

07396844

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Abstract

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A method of fabricating a MOSFET wherein sidewall spacers are provided adjacent the gate of the MOSFET, the method including the steps of providing an insulating layer which extends over the source, drain and gate of the MOSFET and which acts as an impurity diffusion barrier; and forming on the insulating layer sidewall spacers which are composed of an insulating material.

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Patent Owner(s)

Patent OwnerAddress
SGS-THOMSON MICROELECTRONICS LIMITEDPLANAR HOUSE PARKWAY GLOBE PARK MARLOW BUCKS SL7 1YL

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Campbell, Richard N Cwmbran, GB 3 56
Haase, Robert P Cwmbran, GB 6 83
Thompson, Michael K Newport, GB 6 85

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