Gas-sensitive device
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United States of America Patent
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-
Feb 4, 1992
Grant Date -
N/A
app pub date -
Jul 26, 1990
filing date -
Jul 28, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A thin film gas-sensitive device includes an insulating substrate having a pair of electrodes, a gas-sensitive layer having a gas sensitive substance deposited on the insulating substrate and electrodes, and a catalytic layer deposited on the gas-sensitive layer and insulating substrate as a non-continuous layer. The insulating substrate is partly uncovered because the electrodes, the gas-sensitive layer containing the gas-sensitive substance and the catalytic layer do not thoroughly cover the substrate.
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