Thin-film spectroscopic sensor
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United States of America Patent
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Jan 21, 1992
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N/A
app pub date -
Dec 29, 1989
filing date -
Dec 29, 1989
priority date (Note) -
Expired
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Abstract
There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.
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