Resonant radio frequency wave coupler apparatus using higher modes
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United States of America Patent
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Jan 14, 1992
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N/A
app pub date -
Oct 20, 1989
filing date -
Oct 20, 1989
priority date (Note) -
Expired
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Abstract
An improved apparatus for generating a uniform electron cyclotron resonance (ECR) region in a plasma region (16) of a chamber (15) is described. The apparatus uses higher modes of electrical field cusps (16b) which are essentially perpendicular to the magnetic field cusps (16a) in a controlled manner to produce the ECR. The modes are optimal in the ECR region.
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