Method of operating a scanning probe microscope to improve drift characteristics
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United States of America Patent
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Jan 14, 1992
Grant Date -
N/A
app pub date -
Aug 13, 1990
filing date -
Aug 13, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention is a method for operating a Scanning Probe Microscope (SPM) to provide the capability to eliminate the scanner drift that occurs after the scan area is offset within the range of the scanner. The method disclosed comprises applying an offset that is larger than the desired one and then reducing the offset back to the desired value for scanning. The technique has been found to produce good results for both large and small scans.
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