Method for producing silicon halides by reducing silicon tetrhalides under a plasma torch
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United States of America Patent
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Dec 31, 1991
Grant Date -
N/A
app pub date -
May 30, 1990
filing date -
May 30, 1990
priority date (Note) -
Expired
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Abstract
Silicon difluoride is produced by the reduction of silicon tetrafluoride in a plasma torch under argon atmosphere. Instead of the usual reducing agents finely divided silicon has now been used as a reducing agent.
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