Capacitive humidity sensor construction and method for manufacturing the sensor

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United States of America Patent

PATENT NO 5075816
SERIAL NO

07553596

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention concerns a capacitive humidity sensor (6) capable of being connected to a measurement device of dielectric factor and a method for producing the sensor. The sensor comprises a dielectric layer (3), whose dielectric factor changes according to the moisture content absorbed in the layer, and at least two galvanically isolated conductive layers (2,1) enclosing the dielectric layer (3), where one of the conductive layers (2) of the capacitor construction is provided with a random pattern of clefts (7), which allow an immediate communication of ambient air with the dielectric layer (3). According to the invention, the dielectric layer (3) has a solid structure without cracks corresponding to the clefts (7) of the conductive layer (2). The construction according to the invention offers a reduction of the capillary effect and associated hysteresis up to a complete elimination of the effect in some embodiments of the invention.

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Patent Owner(s)

  • VAISALA OY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Stormbom, Lars Vantaa, FI 17 202

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