Positive and negative working radiation sensitive mixtures and production of relief patterns

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United States of America Patent

PATENT NO 5069997
SERIAL NO

07352459

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Abstract

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Positive and negative working radiation sensitive mixtures suitable in particular for producing relief patterns contain a polymeric binder and an organic compound whose solubility in an aqueous alkaline developer is increased by the action of acid and which contains at least one acid cleavable group and also an additional group which upon irradiation forms a strong acid, the polymeric binders being reaction products of polymers that contain phenolic hydroxyl groups with dihydropyran or with alkyl vinyl ethers.

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Patent Owner(s)

Patent OwnerAddress
BASF AKTIENGESELLSCHAFT67056 LUDWIGSHAFEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Binder, Horst Lampertheim, DE 43 427
Schwalm, Reinhold Wachenheim, DE 150 2452

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