Cooled CCD camera for an electron microscope
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United States of America Patent
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-
Nov 12, 1991
Grant Date -
N/A
app pub date -
Aug 3, 1990
filing date -
Aug 3, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus comprising a cooled slow-scan charge-coupled device camera mounted in a chamber attached to a projection or specimen chamber of an electron microscope, and a vacuum valve separating the camera chamber from the microscope chamber. The operation of the vacuum valve is linked to the microscope vacuum system such that the valve remains open while the microscope chamber is under vacuum, but closes if the microscope chamber is about to be let up to atmospheric pressure, and stays closed until the microscope chamber is evacuated again. In an alternate embodiment of the invention, the camera is inserted by a pneumatically operated piston to the microscope chamber, and is withdrawn and sealed off in a separate vacuum chamber in the microscope chamber is about to be let up to air.
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