Electromagnetic lens
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United States of America Patent
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Nov 12, 1991
Grant Date -
N/A
app pub date -
Nov 15, 1990
filing date -
Nov 16, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
There is disclosed a conical electromagnetic lens whose spherical aberration and chromatic aberration coefficients can be made small if the apex angle of the conical lens is small. The lens comprises a conical bobbin through which a beam of charged particles passes and a coil wound on the outer periphery of the bobbin. The number of turns of the coil per unit length along the axis of the lens is increased from the inlet end toward the exit end of the lens.
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