Energy dispersive X-ray spectrometer
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United States of America Patent
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Nov 12, 1991
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N/A
app pub date -
Nov 20, 1990
filing date -
Nov 22, 1989
priority date (Note) -
Expired
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Abstract
An energy dispersive X-ray spectrometer used in combination with an electron microscope is disclosed, in which the energy of an electron beam of the electron microscope, with which a sample is irradiated, is determined exactly by detecting the disappearance point of the energy dispersive X-ray spectra on the high energy side, this energy of the irradiation electron beam thus determined being used as a parameter in a calculation for the quantitative energy dispersive X-ray analysis.
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