Optical alignment system utilizing alignment spot produced by image inverter

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United States of America Patent

PATENT NO 5064286
SERIAL NO

07531025

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and apparatus is disclosed for aligning a reflective surface with an alignment axis in a representative environment of an interferometer. An image of the reflective surface is focused onto a diffuse screen to form a spot image thereon. Rays of the spot image emanating from the diffuse screen are collimated. Some of the collimated rays are focused onto a detector to form a non-inverted image spot. A portion of the collimated rays are intercepted and inverted by means of an image inverter aligned with the alignment axis. The inverted rays are focused onto the detector to form an inverted image spot. The reflecting surface is moved so as to cause the inverted image spot and the non-inverted image spot to coincide, at which point the reflecting surface is aligned with the alignment axis.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ai, Chiayu Tucson, AZ 23 271
Hayes, John B Tucson, AZ 18 673

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