Thermally-actuated microminiature valve

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United States of America Patent

PATENT NO 5058856
SERIAL NO

07697149

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microminiature valve having radially spaced, layered spider legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. Below the legs is a semiconductor substrate having a flow orifice aligned with a valve face. Flexure of the legs displaces the valve face relative to the flow orifice, thereby controlling fluid flow through the orifice.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INC5301 STEVENS CREEK BLVD MS 1A-PB SANTA CLARA CA 95051-7201

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barth, Phillip W Palo Alto, CA 66 2672
Gordon, Gary B Saratoga, CA 86 3632

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