Apparatus for removing static electricity from charged articles existing in clean space
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United States of America Patent
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Oct 15, 1991
Grant Date -
N/A
app pub date -
Oct 13, 1989
filing date -
Mar 7, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor articles, includes a AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positioned apart from the discharge end of each emitter by a predetermined distance. Each opposite conductor is grounded. Emitters of some of the discharge pairs are connected to a high voltage AC source having added thereto negative voltage bias to thereby form pseudo negative pole emitters, and emitters of the other discharge pairs are connected to a high voltage AC source having added thereto a more positive voltage bias relative to the negative voltage bias to thereby form pseudo positive pole emitters.
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