Multi-chamber vacuum installation
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 8, 1991
Grant Date -
N/A
app pub date -
Oct 18, 1990
filing date -
Oct 20, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A multi-chamber vacuum installation includes a charge-changing chamber (5) and a plurality of processing chambers (1, 2, 3, 4) located within the charge-changing chamber. One of the processing chambers (4) also serves as an air lock chamber. The air lock chamber (4) is formed of two parts, and inner part (4a) and an outer part (4b). The inner part is secured to the inside and the outer part is secured to the outside of the charge-changing chamber.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully