Transferring device for semiconductor wafers
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United States of America Patent
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Oct 1, 1991
Grant Date -
N/A
app pub date -
Oct 13, 1989
filing date -
Oct 25, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Transferring device for a semiconductor wafer or like part includes a rotatable carrying arm rotatably for carrying a semiconductor wafer or part from its initial position and through a first angle. The rotatable carrying arm has a holding portion for a wafer or part, and a cam follower portion. A motor rotates the rotatable carrying arm through an angle slightly greater than the first angle slightly past a desired position for the wafer. Then, an eccentric cam returns the carrying arm through a second, incremental angle, for bringing the carrying arm, and, hence, the wafer held thereby, to the desired position.
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