Method of driving a piezoelectric scanner linearly with time

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United States of America Patent

PATENT NO 5051646
SERIAL NO

07622353

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a scanning device producing an image from data obtained from a nonlinear piezoelectric scanner having an attached end and a free end providing the data from a lateral scanning motion of the free end a distance about a center position as a result of the connection of a changing scan voltage to elecrodes carried by the piezoelectric scanner, a method of making the scanning motion of the free end linear with time and increasing the speed at which the data is provided for producing the image. The method comprises the steps of providing a nonlinear signal with time which is a function of the nonlinearity of the piezoelectric scanner; amplifying the nonlinear signal to provide a corresponding nonlinear driving voltage; applying the nonlinear driving voltage to the electrodes of the scanner to scan the free end in a forward scanning motion; obtaining data for use in producing the image during the forward scanning motion; applying the nonlinear driving voltage to the elctrodes of the scanner to scan the free end in a backward scanning motion; obtaining data for use in producing the image during the backward scanning motion; and, repeating the bi-directional scanning and data inputting process until the data needed to create the image has been obtained.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elings, Virgil B Santa Barbara, CA 54 2876
Gurley, John A Santa Barbara, CA 28 1442

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