Device for the electric characterization of samples and application to electric mapping of large area semiconductor samples
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United States of America Patent
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Sep 17, 1991
Grant Date -
N/A
app pub date -
May 9, 1989
filing date -
Nov 17, 1987
priority date (Note) -
Expired
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Abstract
A device for the electric characterization of samples, comprises a UHF resonator intended to be coupled locally to the sample. The resonator is formed by a microstrip or triplate line loop (20) carried by a conducting plane (16) and having a gap of small length with respect to the length of the loop and an assembly (32) for receiving the sample in a position in which the sample is coupled selectively to the edges of the gap without being interposed therebetween. The edges of the gap of the loop are fixed to two electrodes of small area passing through a thin plate of dielectric material having a flat face for application against the sample.
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