Apparatus for removing static electricity from charged articles existing in clean space
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United States of America Patent
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Sep 10, 1991
Grant Date -
N/A
app pub date -
Oct 13, 1989
filing date -
Mar 7, 1989
priority date (Note) -
Expired
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Abstract
An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor devices, includes an AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positiond apart from each emitter by a predetermined distance. A DC voltage (or voltages) is applied to the opposite conductors. By adjusting the DC voltage (or voltages), the positive and negative ion concentration generated by each emitter is controlled. Further, a bias voltage may be added to the DC to increase the ion concentration.
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