Electrodeless microwave-generated radiation apparatus
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United States of America Patent
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Aug 13, 1991
Grant Date -
N/A
app pub date -
Apr 6, 1990
filing date -
Apr 6, 1990
priority date (Note) -
Expired
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Abstract
An electrodeless microwave-generated radiation apparatus includes a microwave cavity wall made of metal material defining a microwave cavity, a lamp arranged in the microwave cavity containing emission material, a microwave generator supplying microwaves for exciting the emission material in the lamp, a microwave-coupling means coupling microwaves to the lamp through a waveguide, and a dielectric mirror arranged behind the lamp. The rise time of the apparatus can be remarkably shortened compared with the known art so that the damage of a magnetron can be reduced. The intensity of emission along the lamp is controlled by a projection or parasitic element. Further, by the use of a dielectric mirror, the object can be processed without temperature of the object to rise too high.
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