Multichannel charged-particle analyzer
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United States of America Patent
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Jul 16, 1991
Grant Date -
N/A
app pub date -
Aug 9, 1990
filing date -
Aug 9, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A charged-particle energy analyzer includes a hollow axisymmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.
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